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civicwong
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Posted: 02-Aug-2012 19:08:49
civicwong |
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What is LTPS?
Low Temperature Poly-crystalline Si
High performance Si film can be made at low temperature under about 600℃ on a glass substrate by using ELA (Excimer Laser Annealing) method. From the result high performance TFTs which have about 100cm2/Vs field effect mobility and high reliability can be achieved
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civicwong
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Posted: 02-Aug-2012 19:10:22
civicwong |
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Quote: |
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Low Temperature Poly-crystalline Si
High performance Si film can be made at low temperature under about 600℃ on a glass substrate by using ELA (Excimer Laser Annealing) method. From the result high performance TFTs which have about 100cm2/Vs field effect mobility and high reliability can be achieved
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Yeah .....
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civicwong
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Posted: 02-Aug-2012 19:11:37
civicwong |
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